Ukwenziwa kwee-semiconductors yenye yezona shishini zinzima kakhulu emhlabeni. Nokuba kukwenziwa kwe-wafer, ukufakwa kwe-thin-film, ukugrumba kwe-plasma, okanye ukufakwa kwe-ion, yonke inkqubo ixhomekeke kwindawo elawulwa kakhulu.

Embindini weenkqubo ezininzi ze-semiconductor kukho igumbi lokucoca umoya.

Igumbi lokufunxa umoya lisenokubonakala ngathi yindawo elula yokuvala intsimbi, kodwa ngokwembono yokuvelisa, lelinye lawona macandelo anzima kakhulu kumatshini. Nokuba ukuphambuka okuncinci, isiphene somphezulu, okanye ingxaki yongcoliseko inokuphazamisa ukuthembeka kwegumbi lokufunxa umoya kwaye ichaphazele ukusebenza kwezixhobo.

Sibone iiprojekthi apho isiphene somphezulu wokutywina ngemicroscope sibangele ukuvuza kwe-vacuum ngexesha lovavanyo, nto leyo ebangele ukuphinda kusetyenziswe izinto ezibizayo kunye nokulibaziseka kokuhanjiswa. Kwimveliso ye-semiconductor, ukuchaneka akupheleli nje kubungakanani—kuchaphazela ngokuthe ngqo ukuzinza kwenkqubo, isivuno, kunye nokuthembeka kwezixhobo.

Kwesi sikhokelo, siza kuphonononga indlela ii-semiconductor vacuum chambers ezisebenza ngayo ngomatshini we-CNC, izixhobo ezisetyenziswa rhoqo, imingeni ephambili yokuvelisa, kunye nezinto abavelisi bezixhobo abafanele bazijonge xa ​​bekhetha umthengisi wemishini.

Yintoni iSemiconductor Vacuum Chamber?

Igumbi lokuvasa le-semiconductor ligumbi elivaliweyo eliyilelwe ukudala nokugcina imeko-bume yokuvasa elawulwayo kwiinkqubo zokwenziwa kwe-semiconductor.

Ezi gumbi zahlula ii-wafers kwaye zicubungula izixhobo ekungcolisweni komoya ngelixa zivumela ulawulo oluchanekileyo loxinzelelo, ubushushu, kunye nokwakheka kwegesi.

Indima kwiMveliso yeeSemiconductor

Amagumbi okucoca abalulekile kwiinkqubo ezininzi zemveliso ye-semiconductor, kuquka:

• Ukubekwa kwefilimu encinci
• Ukugrumba ngeplasma
• Ukucoca iiwafer
• Ukufakelwa kwe-ion
• Unyango lomphezulu
• Ukubeka iliso kwinkqubo

Ngaphandle kwendawo yokufunxa i-vacuum ezinzileyo, ukuhambelana kwenkqubo kunye nomgangatho we-wafer unokuphazamiseka kakhulu.

Iinkqubo eziqhelekileyo zeSemiconductor

Iindidi ezahlukeneyo zeegumbi zokucoca zisetyenziswa kulo lonke ixesha lokwenziwa kwee-semiconductor.

Inkqubo nganye ibeka iimfuno ezahlukeneyo kuyilo lwegumbi, ukugqitywa komphezulu, kunye nokukhethwa kwezinto.

Kutheni Kubalulekile Ukuba Nobunyulu Bokungaziphathi Kakuhle

Ukugcinwa kwe-vacuum cleaner kubalulekile kuba nokuba ukuvuza okuncinci kunokungenisa ungcoliseko, ukufuma, okanye iigesi ezingafunekiyo kwindawo yokusebenza.

Iziphumo ezinokubakho ziquka:

• Uzinzo lwenkqubo olunciphileyo
• Ungcoliseko lwamasuntswana
• Ixesha lokungasebenzi kwezixhobo
• Ukulahleka kwesivuno
• Iindleko zokulungisa ezinyukileyo

Ngenxa yesi sizathu, amagumbi okucoca i-semiconductor afuna imigangatho yokuvelisa eqinileyo kakhulu kunezixhobo zemizi-mveliso eziqhelekileyo.

Izinto ezisetyenziswa rhoqo kwiindawo zokucoca i-vacuum

Ukukhethwa kwezinto kuchaphazela ngokuthe ngqo ukusebenza kwe-vacuum, ukumelana nokugqwala, uzinzo lobushushu, kunye neendleko zokuvelisa.

I-Aluminiyam 6061-T6

I-Aluminium 6061-T6 yenye yezona zinto zisetyenziswa kakhulu kwiindawo zokucoca i-semiconductor vacuum.

Iingenelo ziquka:

• Ukusebenza kakuhle kakhulu
• Isakhiwo esilula
• Ukumelana okuhle nokugqwala
• Ixabiso lezinto ezikhuphisanayo
• Uzinzo oluphezulu

Amagumbi amaninzi okufunxa amanzi aphakathi enziwe nge-aluminium engu-6061-T6.

I-Aluminiyam 5083

I-Aluminium 5083 idla ngokukhethwa xa kufuneka i-porosity ephantsi kunye nokusebenza ngcono kwe-vacuum.

Iingenelo ziquka:

• Ukudityaniswa okungcono
• Ukuncipha kwe-porosity yangaphakathi
• Ukuhambelana okuphuculweyo kwe-vacuum
• Ukumelana okuhle nokugqwala

Isetyenziswa rhoqo kwiindibano ezinkulu zegumbi lokucoca i-vacuum ezitshixiweyo.

Intsimbi Engagqwaliyo 304

I-Stainless Steel 304 inika ukuqina okugqwesileyo kunye nokumelana neekhemikhali.

Izicelo ziquka:

• Amagumbi enkqubo
• Izixhobo zokuphatha iikhemikhali
• Iindawo ezinobushushu obuphezulu

Intsimbi Engagqwaliyo 316L

Intsimbi engagqwaliyo ye-316L ikhethwa kakhulu kwiindawo ezifuna kakhulu ukugqwala kunye nococeko.

Umthamo wayo ophantsi wekhabhoni ukwaphucula umgangatho wokuwelda kwaye kunciphisa iingozi zongcoliseko.

I-Titanium

I-Titanium idla ngokugcinelwa ukusetyenziswa kwe-semiconductor ekhethekileyo apho kufuneka khona ukumelana nokugqwala okugqwesileyo kunye nomlinganiselo ophezulu wamandla ukuya kubunzima.

Ukuthelekiswa kwezinto eziqhelekileyo zegumbi le-Vacuum

Iimfuno eziphambili zeCNC Machining kwiigumbi zeVacuum

Umatshini wokucoca igumbi lokucoca ufuna okungaphezulu kakhulu kunokuhlangabezana nobunzima obufunekayo.

Ukunyamezelana Okuqinileyo

Iimpawu ezibalulekileyo zegumbi zihlala zifuna ukunyamezelana okususela koku:

• ± 0.05 mm
• ± 0.02 mm
• ± 0.01 mm

kuxhomekeke kwiimfuno zokutywina kunye nobunzima bokuhlanganisa.

Iindawo zokuqhalana, iindawo zeflange, kunye neendawo ezibalulekileyo zokunxibelelanisa kufuneka zenziwe ngomatshini ngokuchanekileyo okukhulu.

Ulawulo lweFlatness

Imiphezulu yokutywina imele enye yezona zinto zibalulekileyo kwigumbi lokucoca umoya.

Nokuba ukuphambuka okuncinci kokuthe tyaba kunokuphazamisa ukusebenza kokutywina.

Iiflangi ezinkulu zegumbi lokucoca umoya zihlala zifuna amaqhinga okusebenza ngononophelo ukuze kugcinwe ucwangco kulo lonke umphezulu.

Iimfuno zokuGxila

Iiports, iindawo ezivulekileyo, kunye neempawu zokudibana zihlala zifuna ulawulo oluqinileyo lokugxila ukuqinisekisa ukulungelelana okufanelekileyo ngexesha lokuhlanganiswa.

Ukungakwazi ukugxila kakuhle kunokubangela oku kulandelayo:

• Imiba yokuhlanganisa
• Ukungaphumeleli kwetywina
• Uxinzelelo oluphezulu

Iimfuneko zokugqiba umphezulu

Umgangatho womphezulu udlala indima enkulu ekusebenzeni kwe-vacuum.

Imiphezulu erhabaxa ingenza oku kulandelayo:

• Izinto ezingcolisayo zemigibe
• Yandisa ukurhaxwa kwegesi
• Iinkqubo zokucoca ezinzima

Kwiinkqubo ezininzi ze-semiconductor, kufuneka iindawo ezigudileyo nezihambelanayo kuyo yonke indawo engaphakathi kwegumbi.

Umatshini ongenamaqhekeza

Enye yezona ngxaki zinkulu ekuvelisweni kwezixhobo ze-semiconductor kukunciphisa ukuveliswa kwee-particles.

Iinkqubo zoomatshini kufuneka zilawulwe ngononophelo ukuze kuncitshiswe:

• Ukwakheka kweBurr
• Amasuntswana afakiweyo
• Ungcoliseko lomphezulu
• Inkunkuma eseleyo yoomatshini bokulungisa

Iimfuno zokugqiba umphezulu kwizicelo ze-Semiconductor

Ukugqitywa komphezulu kuchaphazela ngokuthe ngqo ukusebenza kwe-vacuum kunye nokucoceka.

Ukugqitywa koMatshini oqhelekileyo

Ukugqitywa okuqhelekileyo komatshini kunokwamkeleka kwiindawo zangaphandle ezingabalulekanga kangako.

Uburhabaxa obuqhelekileyo:

I-Ra 3.2 μm

Umphezulu Omhle Owenziwe Ngomatshini

Iindawo ezininzi zokunxibelelana nge-vacuum zifuna umatshini ocoliweyo.

Uburhabaxa obuqhelekileyo:

I-Ra 1.6 μm

okanye ngcono.

Ukucoca nge-electropolishing

I-electropolishing isetyenziswa kakhulu kwiindawo zokufunxa i-vacuum zentsimbi engagqwaliyo.

Iingenelo ziquka:

• Ukuncipha koburhabaxa bomphezulu
• Ucoceko oluphuculweyo
• Ukumelana nokugqwala okungcono

Ukupholisa

Izixhobo zegumbi le-vacuum ze-aluminium zihlala ziguqulwa zibe yi-anodized ukuphucula:

• Ukumelana nokugqwala
• Ukumelana nokunxiba
• Ukuqina komphezulu

Uthelekiso lokugqiba umphezulu

Indlela Ukuvuza Kwe-Vacuum Okunokubangelwa Ngayo Yimisebenzi Engeyiyo Yoomatshini

Iziphene zomphezulu

Imikrwelo, ukuqhekeka, kunye neempawu zoomatshini zingonakalisa iindawo zokutywina.

Nokuba zizinto ezincinci ezingafezekanga zinokuba ziindlela zokuvuza phantsi kweemeko zokungasebenzi kakuhle.

Iingxaki zePorosity

Ukuvuleka kwezinto ezibonakalayo kunokuvumela iigesi ukuba zingene ngaphakathi kweendonga zegumbi.

Le ngxaki ibaluleke kakhulu xa ukhetha izinto ze-aluminium.

Iindawo zokutywina ezingafanelekanga

Ukulawulwa okungalunganga kokusithamba kunokuthintela ukucinezelwa kakuhle kwe-gasket kwaye kukhokelela ekuvuzeni.

Ukugqwetheka kweWelding

Amagumbi amakhulu okucoca ahlala enezakhiwo ezidityanisiweyo.

Iinkqubo zokuwelda ezingalunganga zinokubangela ukugqwetheka okuchaphazela ukutywinwa kwemiphezulu.

Iingozi zokungcoliswa

Iintsalela zoomatshini ezishiywe ngaphakathi kwigumbi zinokungcolisa iinkqubo ze-semiconductor kwaye zichaphazele isivuno.

Ulawulo loMgangatho weeGumbi zeVacuum zeSemiconductor

Uhlolo lweCMM

IiCoordinate Measuring Machines (CMMs) ziqinisekisa:

• Ubukhulu obubalulekileyo
• Ukuthe tyaba
• Ukunyamezelana kwezikhundla
• Iimpawu zejometri

Uvavanyo lokuvuza

Amagumbi okucoca umoya ahlala evavanywa ukuvuza ukuqinisekisa ukusebenza kokutywinwa kwawo.

Ngokuxhomekeke kwisicelo, iindlela zovavanyo zingabandakanya:

• Uvavanyo loxinzelelo
• Uvavanyo lokubamba i-vacuum
• Ukufunyanwa kokuvuza kweHelium

Isiqinisekiso sezinto

Izatifikethi zezinto ezibonakalayo ziqinisekisa:

• Ukwakheka kweekhemikhali
• Iipropati zoomatshini
• Ukulandeleka

Ukulinganiswa koBurhabaxa bomphezulu

Abavavanyi boburhabaxa bomphezulu baqinisekisa ukuthotyelwa kweemfuno ezithile zokugqiba.

Iinkqubo zokucoca

Iinkqubo zokucoca zokugqibela zihlala zifuneka ngaphambi kokuba zithunyelwe ukuze kususwe izinto ezingcolisayo kunye neentsalela zomatshini.

Iindlela zokuhlola ezisetyenziselwa iiGumbi zoVutha

Imingeni kwiMishini yokuHlanganisa iiGumbi ezinkulu zoVutha

Ukuphambuka kweCandelo

Uxinzelelo lwezinto eziphathekayo lunokubangela utshintsho olukhulu ngexesha lokwenziwa kwemishini.

Uzinzo lobushushu

Izinto ezinkulu zinokuba nokwanda kobushushu ngexesha lemijikelo emide yokwenziwa kwemishini.

Ixesha lokwenziwa kweMishini

Amagumbi amakhulu adla ngokufuna:

• Useto oluninzi
• Amaxesha omjikelo ande
• Izixhobo ezinkulu

Umatshini Wokwenza Amacala Amaninzi

Iijometri zegumbi ezintsonkothileyo zihlala zifuna ukwenziwa kwemishini ukusuka kwiindawo ezahlukeneyo, nto leyo eyonyusa ubunzima bokuseta kunye neemfuno zokuhlola.

Ukuveliswa kweChamber yeVacuum eTshayina kunye ne-USA

Uthelekiso lweendleko

Abavelisi baseTshayina badla ngokubonelela ngeendleko eziphantsi zemveliso ngelixa begcina amandla okuchaneka okukhuphisanayo.

Ixesha lokukhokhela

Amaxesha okukhokela axhomekeke kubunzima beprojekthi, kodwa abathengisi abaninzi baseTshayina basebenzisa iinkqubo zemveliso ezisebenzayo kakhulu ezikwaziyo ukuxhasa zombini iimfuno zeprototype kunye nemveliso.

Ubuchule bokuchaneka

Izakhiwo ze-CNC zanamhlanje eTshayina zihlala zisebenza:

• Amaziko oomatshini ajikeleze i-3-axis
• Amaziko oomatshini ane-axis ezi-4
• Amaziko oomatshini ane-axis ezi-5
• Iinkqubo zokuhlola eziphambili

ekwaziyo ukuhlangabezana neemfuno ze-semiconductor ezifunekayo.

Inkxaso yoBunjineli

Ababoneleli ababalaseleyo babonelela ngophononongo lobunjineli, iingcebiso ze-DFM, kunye nokuphuculwa kokwenziwa kwemveliso ngaphambi kokuba kuqale imveliso.

Indlela yokukhetha umthengisi we-CNC wee-Semiconductor Vacuum Chambers

Amava kuShishino lweVacuum

Khangela ababoneleli abanamava okuxhasa abavelisi bezixhobo ze-semiconductor kunye ne-vacuum.

Ubuchule bezinto eziphathekayo

Umthengisi kufuneka aqonde indlela esebenza ngayo imisebenzi yoomatshini:

• I-Aluminiyam 6061
• I-Aluminiyam 5083
• Intsimbi Engagqwaliyo 304
• Intsimbi Engagqwaliyo 316L
• I-Titanium

Ubuchule bokuhlola

Vavanya izixhobo zokuhlola ezikhoyo kunye neenkqubo zomgangatho.

Imeko yoShishino olucocekileyo

Iindlela zokuvelisa ezicocekileyo zinceda ekunciphiseni iingozi zongcoliseko.

Inkxaso yoVavanyo lokuVuza

Ababoneleli abakwaziyo ukuxhasa uvavanyo lokuvuza banokwenza lula ulawulo lweprojekthi kwaye baphucule ukuqinisekiswa komgangatho.

Indlela uKachi axhasa ngayo abavelisi bezixhobo ze-semiconductor

KwiKachi Precision Manufacturing, sixhasa abavelisi bezixhobo ze-semiconductor abanezisombululo ze-CNC machining ezichanekileyo zezixhobo zegumbi le-vacuum ezintsonkothileyo kunye neendibano ezinxulumene nazo.

Ukusila okuchanekileyo kwe-CNC

Senza izinto ze-aluminium ezichanekileyo kakhulu kunye nentsimbi engagqwaliyo enolawulo oluqinileyo nolunemilinganiselo eqinileyo.

Izixhobo zeGumbi lokuVutha

Iqela lethu lixhasa ukwenziwa kwemizimba yegumbi, iiflange, izakhiwo zokufakela, kunye nezixhobo zenkqubo ye-vacuum ezenziwe ngokwezifiso.

Umatshini wokunyamezelana okuqinileyo

Sihlala sijonga izinto ezichanekileyo ngoomatshini ezifuna ulawulo oluqinileyo nolunemilinganiselo.

Uhlolo kunye namaxwebhu

Iinkqubo zokuhlola ezipheleleyo kunye namaxwebhu anceda ukuqinisekisa ukuhambelana kuyo yonke imveliso.

Isiphelo

Iigumbi zokucoca i-semiconductor zimele ezinye zeeprojekthi zoomatshini be-CNC ezifuna kakhulu kwimveliso yanamhlanje.

Impumelelo ixhomekeke kakhulu kunokwenza nje into ethile ukuze iprintwe. Ukukhethwa kwezinto, ukuchaneka kobukhulu, umgangatho wokugqitywa komphezulu, ulawulo longcoliseko, kunye nokuqina kwe-vacuum zonke zidlala indima ebalulekileyo ekusebenzeni kokugqibela.

Kwabavelisi bezixhobo ze-semiconductor, ukukhetha iqabane lomatshini elinobuchule bobunjineli obuqinileyo, iinkqubo zokuhlola ngokuchanekileyo, kunye namava ngezicelo ze-vacuum kunokunciphisa kakhulu umngcipheko weprojekthi kwaye kuphucule ukuthembeka kwexesha elide.

FAQ

Zeziphi izinto ezifanelekileyo kwiigumbi zokucoca i-semiconductor?

I-Aluminium 6061-T6, i-Aluminium 5083, i-Stainless Steel 304, kunye ne-Stainless Steel 316L zezinye zezona zinto zisetyenziswa kakhulu, kuxhomekeke kwiimfuno ze-vacuum kunye neemeko zenkqubo.

Kutheni ukugqitywa komphezulu kubalulekile kwiindawo zokucoca i-vacuum?

Ukugqitywa komphezulu kuchaphazela ucoceko, ukuziphatha kokukhupha igesi, ulawulo longcoliseko, kunye nokusebenza kokuvala.

Yintoni ukunyamezelana okufunekayo xa kusetyenzwa nge-vacuum chamber machining?

Iimpawu ezininzi ezibalulekileyo zifuna ukunyamezelana phakathi kwe-±0.05 mm kunye ne-±0.01 mm, kuxhomekeke kwiimfuno zokusetyenziswa.

Kuvavanywa njani ukuvuza kwamagumbi okucoca umoya?

Iindlela eziqhelekileyo ziquka uvavanyo lokubamba i-vacuum, uvavanyo loxinzelelo, kunye nokufumanisa ukuvuza kwe-helium.

Ngaba amagumbi e-aluminium enziwe ngomatshini we-CNC angaphumelela ekusebenzeni okuphezulu kakhulu kwe-vacuum?

Ewe. Ukukhethwa kwezinto ezifanelekileyo, umatshini wokulungisa ngokuchanekileyo, unyango lomphezulu, ukucoca, kunye novavanyo lokuvuza kunokwenza amagumbi e-aluminium ahlangabezane neemfuno ezifunekayo zokucoca umoya.

Ngaba ufuna iqabane elithembekileyo le-CNC Machining Components kwi-Semiconductor Vacuum Chamber Components?

KwiKachi Precision Manufacturing, sixhasa abavelisi bezixhobo ze-semiconductor ngomatshini wokulungisa ngokuchanekileyo, ulawulo lokunyamezelana okuqinileyo, kunye neenkqubo zokuhlola ezingqongqo zegumbi lokucoca kunye neendibano.

Nxibelelana neqela lethu lobunjineli namhlanje ukuze ufumane uphononongo lobuchwephesha kunye nekowuteshini ekhawulezileyo.